DIELECTRIC AND INTERFACE PROPERTIES OF PYROLYTIC ALUMINUM OXIDE FILMS ON SILICON SUBSTRATES

被引：12

作者：

DUFFY, MT

CARNES, JE

RICHMAN, D

机构：

来源：

METALLURGICAL TRANSACTIONS | 1971年 / 2卷 / 03期

关键词：

D O I：

10.1007/BF02662719

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

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页码：667 / +

页数：1

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