INTERACTION OF AMORPHOUS FLUOROPOLYMER WITH METAL

被引：38

作者：

WU, PK ^{[1
]}

YANG, GR ^{[1
]}

MA, XF ^{[1
]}

LU, TM ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,DEPT PHYS,TROY,NY 12180

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 04期

关键词：

D O I：

10.1063/1.112281

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The bonding structure of an amorphous fluoropolymer, AF 1600, with Al, Ag, Au, and Cu were examined using x-ray photoelectron spectroscopy. 100 angstrom thick films of AF 1600 were deposited on various metal films. AlF3 was found at the AF 1600/Al interface. F detached from the -CF3 functional group of the AF 1600, diffused into the Al/Al2O3 matrix and formed AlF3. The diffusion depth of F is estimated to be > 150 angstrom. An Al film was evaporated onto an AF 1600 film. The Al film was then mechanically peeled off and the remaining polymer surface examined. AlF3 was again found. For the spin-on AF 1600 film on Ag, Au, and Cu, no chemical reaction between the metal and the polymer were found.

引用

页码：508 / 510

页数：3

共 10 条

[1] DEPOSITION OF AMORPHOUS FLUOROPOLYMERS THIN-FILMS BY LASER ABLATION [J].