DEPOSITION OF AMORPHOUS FLUOROPOLYMER THIN-FILMS BY THERMOLYSIS OF TEFLON AMORPHOUS FLUOROPOLYMER

被引:94
作者
NASON, TC
MOORE, JA
LU, TM
机构
[1] RENSSELAER POLYTECH INST,DEPT CHEM,TROY,NY 12180
[2] RENSSELAER POLYTECH INST,DEPT PHYS,TROY,NY 12180
关键词
D O I
10.1063/1.107163
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films (0.3-5-mu-m) of an amorphous fluoropolymer (AF) derived from the copolymeric material Teflon AF 1600 were deposited on Si (100) wafers by vacuum pyrolysis. Infrared spectroscopy indicated that the composition of the deposited films was similar to the source material. The deposited films were amorphous by x-ray diffraction. The surface morphology contained micropores which did not extend through films deposited at a low rate. The refractive index was approximately 1.2 at 633 nm. Comparisons are made to films derived from ordinary Teflon (also by pyrolysis). The mechanism for the repolymerization of the Teflon AF copolymer at the substrate surface is discussed.
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页码:1866 / 1868
页数:3
相关论文
共 13 条
[1]   PROPERTIES OF FLUOROCARBON FILMS PREPARED BY RF SPUTTERING AND PLASMA POLYMERIZATION IN INERT AND ACTIVE GAS [J].
BIEDERMAN, H ;
OJHA, SM ;
HOLLAND, L .
THIN SOLID FILMS, 1977, 41 (03) :329-339
[2]  
CHANG CA, 1987, MATER RES SOC S P, V93, P369
[3]  
DEWILDE W, 1973, VACUUM, V24, P307
[4]   EFFECT OF IONIZING-RADIATION ON THE CHEMICAL-COMPOSITION, CRYSTALLINE CONTENT AND STRUCTURE, AND FLOW PROPERTIES OF POLYTETRAFLUOROETHYLENE [J].
FISHER, WK ;
CORELLI, JC .
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1981, 19 (10) :2465-2493
[5]   INVESTIGATIONS OF STRUCTURE OF THIN FLUOROCARBON FILMS BY X-RAY DIFFRACTION AND INFRARED SPECTROSCOPY [J].
GIEGENGACK, H ;
HINZE, D .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1971, 8 (02) :513-+
[6]  
HANFORD WE, 1946, J AM CHEM SOC, V68, P2081
[7]   SPUTTERED AND PLASMA POLYMERIZED FLUOROCARBON FILMS [J].
HOLLAND, L ;
BIEDERMAN, H ;
OJHA, SM .
THIN SOLID FILMS, 1976, 35 (02) :L19-L21
[8]   SOME CHARACTERISTICS AND USES OF LOW-PRESSURE PLASMAS IN MATERIALS SCIENCE [J].
HOLLAND, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :5-15
[9]   ADHESION OF METALS TO SPIN-COATED FLUOROCARBON POLYMER-FILMS [J].
KIM, YK ;
CHANG, CA ;
SCHROTT, AG .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (01) :251-254
[10]  
KOIZUMI N, 1968, J POLYM SCI C, V21, P499