共 13 条
[2]
CHANG CA, 1987, MATER RES SOC S P, V93, P369
[3]
DEWILDE W, 1973, VACUUM, V24, P307
[5]
INVESTIGATIONS OF STRUCTURE OF THIN FLUOROCARBON FILMS BY X-RAY DIFFRACTION AND INFRARED SPECTROSCOPY
[J].
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE,
1971, 8 (02)
:513-+
[6]
HANFORD WE, 1946, J AM CHEM SOC, V68, P2081
[8]
SOME CHARACTERISTICS AND USES OF LOW-PRESSURE PLASMAS IN MATERIALS SCIENCE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1977, 14 (01)
:5-15
[10]
KOIZUMI N, 1968, J POLYM SCI C, V21, P499