DEPOSITION OF AMORPHOUS FLUOROPOLYMERS THIN-FILMS BY LASER ABLATION

被引:86
作者
BLANCHET, GB
机构
[1] E. I. DuPont de Nemours, Central Research Department, Wilmington
关键词
D O I
10.1063/1.108939
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of the amorphous fluoropolymer, Teflon AF(R), were deposited by laser ablation using the 4th harmonic, at 266 nm, of a Nd-YAG laser. Infrared spectroscopy indicated that the composition of the ablated films were that of the starting materials and x-ray diffraction spectra corroborated the lack of crystallinity. The morphology of the films was controlled by the temperature of the substrate during film formation. We suggest pyrolitic decomposition and subsequent repolymerization as a possible mechanism to the formation of Teflon-AF(R) films by laser ablation.
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页码:479 / 481
页数:3
相关论文
共 20 条
[1]   FLUOROCARBON FILMS SPUTTERED UNDER VARIOUS CONDITIONS [J].
BIEDERMAN, H .
THIN SOLID FILMS, 1978, 55 (03) :L11-L13
[2]  
BIEDERMAN H, 1977, THIN SOLID FILMS, V41, P339
[3]  
BLANCHET GB, IN PRESS APPL PHYS L, V62
[4]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[5]   EVAPORATION OF POLYTETRAFLUOROETHYLENE BY ELECTRON-BOMBARDMENT OF BULK MATERIAL [J].
DEWILDE, W .
THIN SOLID FILMS, 1974, 24 (01) :101-111
[6]  
DEWILDE W, 1973, VACUUM, V24, P307
[7]   FACTORS AFFECTING THE THERMAL STABILITY OF POLYTETRAFLUOROETHYLENE [J].
FLORIN, RE ;
WALL, LA ;
BROWN, DW ;
HYMO, LA ;
MICHAELSEN, JD .
JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1954, 53 (02) :121-130
[8]  
HARROP R, 1969, THIN SOLID FILMS, V3, P118
[9]   SPUTTERED AND PLASMA POLYMERIZED FLUOROCARBON FILMS [J].
HOLLAND, L ;
BIEDERMAN, H ;
OJHA, SM .
THIN SOLID FILMS, 1976, 35 (02) :L19-L21
[10]  
HOLLAND L, 1973, NUCL INSTRUM METHODS, V3, P555