SURFACE CLEANING IN THIN-FILM TECHNOLOGY

[1] IODINE TREATMENT OF NYLON - EFFECT ON METAL PLATING OF POLYMER [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1971, 15 (11) : 2865 - &

[2] ETCHING OF HIGH ALUMINA CERAMICS TO PROMOTE COPPER ADHESION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (11) : 1518 - 1522

[3] AMICK JA, 1976, SOLID STATE TECHNOL, V19, P47

[4] INVESTIGATION OF LOW-ENERGY ION SCATTERING AS A SURFACE ANALYTICAL TECHNIQUE [J]. SURFACE SCIENCE, 1972, 30 (01) : 69 - &

[5] CLEANING AND SURFACE PREPARATION [J]. THIN SOLID FILMS, 1978, 53 (01) : 97 - 98

[6] ATOMICALLY CLEAN SURFACES BY PULSED LASER BOMBARDMENT [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) : 4776 - &

[7] BERMAN SM, 1975, EFFICIENT USE ENER 3, P292

[8] PLASMA ETCHING OF THIN METAL AND DIELECTRIC FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 169 - 169

[9] BICKERMAN JJ, 1965, PHYS STATUS SOLIDI, V10, P3

[10] CALDER R, 1977, 7TH P INT VAC C 3RD, P231

[1] IODINE TREATMENT OF NYLON - EFFECT ON METAL PLATING OF POLYMER [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1971, 15 (11) : 2865 - &

[2] ETCHING OF HIGH ALUMINA CERAMICS TO PROMOTE COPPER ADHESION [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (11) : 1518 - 1522

[3] AMICK JA, 1976, SOLID STATE TECHNOL, V19, P47

[4] INVESTIGATION OF LOW-ENERGY ION SCATTERING AS A SURFACE ANALYTICAL TECHNIQUE [J]. SURFACE SCIENCE, 1972, 30 (01) : 69 - &

[5] CLEANING AND SURFACE PREPARATION [J]. THIN SOLID FILMS, 1978, 53 (01) : 97 - 98

[6] ATOMICALLY CLEAN SURFACES BY PULSED LASER BOMBARDMENT [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) : 4776 - &

[7] BERMAN SM, 1975, EFFICIENT USE ENER 3, P292

[8] PLASMA ETCHING OF THIN METAL AND DIELECTRIC FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 169 - 169

[9] BICKERMAN JJ, 1965, PHYS STATUS SOLIDI, V10, P3

[10] CALDER R, 1977, 7TH P INT VAC C 3RD, P231