AES STUDY OF SILICON BONDING STATES DURING OXIDATION OF SI(111)

被引：56

作者：

LANG, B ^{[1
]}

SCHOLLER, P ^{[1
]}

CARRIERE, B ^{[1
]}

机构：

[1] UNIV STRASBOURG 1,F-67070 STRASBOURG,FRANCE

来源：

SURFACE SCIENCE | 1980年 / 99卷 / 01期

关键词：

D O I：

10.1016/0039-6028(80)90580-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：103 / 111

页数：9

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