MONOLITHIC INTEGRATED-OPTIC POSITION/DISPLACEMENT SENSOR USING WAVE-GUIDE GRATINGS AND QW-DFB LASER

被引：35

作者：

SUHARA, T ^{[1
]}

TANIGUCHI, T ^{[1
]}

UEMUKAI, M ^{[1
]}

NISHIHARA, H ^{[1
]}

HIRATA, T ^{[1
]}

IIO, S ^{[1
]}

SUEHIRO, M ^{[1
]}

机构：

[1] YOKOGAWA ELECT CORP,OPTOELECTR LABS,MUSASHINO,TOKYO 180,JAPAN

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1995年 / 7卷 / 10期

关键词：

D O I：

10.1109/68.466588

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A monolithic fully-integrated interferometer position/displacement sensor is proposed. The device is implemented with waveguide grating components, a GRIN SCH SQW DFB laser and photodiodes. A prototype device of 6.5 x 2.0 mm(2) chip size and 0.4 x 0.4 mm(2) sensing beam aperture is fabricated, and the sensor operation of submicron resolution is demonstrated.

引用

页码：1195 / 1197

页数：3

共 11 条

[1] A NOVEL GRIN-SCH-SQW LASER DIODE MONOLITHICALLY INTEGRATED WITH LOW-LOSS PASSIVE WAVE-GUIDES [J].

HIRATA, T ;

MAEDA, M ;

HOSOMATSU, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (08) :L1429-L1432

[2] DEMONSTRATION OF A WAVE-GUIDE LENS MONOLITHICALLY INTEGRATED WITH A LASER-DIODE BY COMPOSITIONAL DISORDERING OF A QUANTUM-WELL [J].

HIRATA, T ;

SUEHIRO, M ;

HIHARA, M ;

DOBASHI, M ;

HOSOMATSU, H .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1993, 5 (06) :698-700

[3]

LIZET J, 1987, 4TH P EUR C INT OPT, P210

[4] INTEGRATED-OPTICS COMPONENTS AND DEVICES USING PERIODIC STRUCTURES [J].

SUHARA, T ;

NISHIHARA, H .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1986, 22 (06) :845-867

[5]

SUHARA T, 1989, PROC SPIE, V1136, P92, DOI 10.1117/12.961671

[6] FOCUSING GRATING COUPLER IN ALGAAS OPTICAL WAVE-GUIDE [J].

SUHARA, T ;

OKADA, K ;

SASO, T ;

NISHIHARA, H .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1992, 4 (08) :903-905

[7]

SUHARA T, 1987, APR TECH DIG C LA FQ, V3

[8]

SUHARA T, 1985, TECH DIG IOOC ECOC 8, V1, P117

[9]

SUHARA T, UNPUB ELECTRON LETT

[10]

SUHARA T, 1989, TECH DIG C LASER ELE, V7, P270

← 1 2 →