DEMONSTRATION OF A WAVE-GUIDE LENS MONOLITHICALLY INTEGRATED WITH A LASER-DIODE BY COMPOSITIONAL DISORDERING OF A QUANTUM-WELL

被引：12

作者：

HIRATA, T

SUEHIRO, M

HIHARA, M

DOBASHI, M

HOSOMATSU, H

机构：

[1] Devices Laboratory, Yokogawa Electric Corporation

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1993年 / 5卷 / 06期

关键词：

D O I：

10.1109/68.219715

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An elliptic waveguide lens is monolithically integrated with a GaAs/AlGaAs distributed feedback laser diode and a grating output coupler by electron beam lithography, ion implantation, and two-step metalorganic vapor phase epitaxy. The waveguide lens is formed by etching of a patterning layer in order that the fabrication process of the waveguide lens is compatible with that of the laser diode. Collimated output light is directly obtained from a semiconductor substrate using this waveguide lens and a grating output coupler.

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页码：698 / 700

页数：3

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