INVESTIGATION OF THIN-FILM NI/SINGLE-CRYSTAL SIC INTERFACE REACTION

被引:50
作者
OHDOMARI, I [1 ]
SHA, S [1 ]
AOCHI, H [1 ]
CHIKYOW, T [1 ]
机构
[1] ADV MAT LAB INC,SAITAMA 340,JAPAN
关键词
D O I
10.1063/1.339259
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:3747 / 3750
页数:4
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