INSITU STUDY OF THE THERMAL-DECOMPOSITION OF B2H6 BY COMBINING SPECTROSCOPIC ELLIPSOMETRY AND KELVIN PROBE MEASUREMENTS

被引：32

作者：

CABARROCAS, P

KUMAR, S

DREVILLON, B

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 07期

关键词：

D O I：

10.1063/1.344122

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3286 / 3292

页数：7

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