INSITU STUDY OF P-TYPE AMORPHOUS-SILICON GROWTH FROM B2H6 - SIH4 MIXTURES - SURFACE REACTIVITY AND INTERFACE EFFECTS

被引：24

作者：

COLLINS, RW ^{[1
]}

机构：

[1] BP AMER RES & DEV,CLEVELAND,OH 44128

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 12期

关键词：

D O I：

10.1063/1.100029

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1086 / 1088

页数：3

共 12 条

[1] OPTICAL-PROPERTIES OF THIN-FILMS [J].

ASPNES, DE .

THIN SOLID FILMS, 1982, 89 (03) :249-262

[2] AMORPHOUS SILICON SOLAR-CELL [J].

CARLSON, DE ;

WRONSKI, CR .

APPLIED PHYSICS LETTERS, 1976, 28 (11) :671-673

[3] A METHOD FOR IMPROVED SHORT-WAVELENGTH RESPONSE IN HYDROGENATED AMORPHOUS SILICON-BASED SOLAR-CELLS [J].

CATALANO, A ;

WOOD, G .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (04) :1220-1222

[4]

CATALANO A, 1985, 16TH IEEE PHOT SPEC, P1421

[5]

Collins R. W., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V617, P62, DOI 10.1117/12.961074

[6] SURFACE-STRUCTURE OF GLOW-DISCHARGE A-SI-H - IMPLICATIONS FOR MULTILAYER FILM GROWTH [J].

COLLINS, RW ;

CAVESE, JM .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 :1439-1442

[7]

COLLINS RW, IN PRESS AMORPHOUS S

[8] GAS AND SURFACE PROCESSES LEADING TO HYDROGENATED AMORPHOUS-SILICON FILMS [J].

GALLACHER, A ;

SCOTT, J .

SOLAR CELLS, 1987, 21 :147-152

[9] PHYSICAL-PROPERTIES OF AMORPHOUS CVD SILICON [J].

HIROSE, M .

JOURNAL DE PHYSIQUE, 1981, 42 (NC4) :705-714

[10] INDUSTRIALIZATION OF ALPHA-SI SOLAR-CELLS [J].

KUWANO, Y ;

OHNISHI, M .

JOURNAL DE PHYSIQUE, 1981, 42 (NC4) :1155-1164

← 1 2 →