NOVEL METHOD FOR MEASURING AND ANALYZING SURFACE-ROUGHNESS ON SEMICONDUCTOR-LASER ETCHED FACETS

被引：4

作者：

HERRICK, RW

SABO, LG

LEVY, JL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 06期

关键词：

D O I：

10.1116/1.585643

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We introduce a method of measuring the surface profile of etched facets on semiconductor lasers, giving direct, quantitative results. Unlike previous techniques which attempt to infer facet quality from electro-optic performance or subjective analysis of micrographs, this technique provides the actual facet profile. We show how this information can be used for process improvement, and accurate numerical simulation of facet reflectivity.

引用

收藏

页码：2778 / 2783

页数：6

相关论文

共 31 条

[21] MODAL PROPERTIES OF UNSTABLE RESONATOR SEMICONDUCTOR-LASERS WITH A LATERAL WAVE-GUIDE [J].

SALZMAN, J ;

LANG, R ;

VENKATESAN, T ;

MITTLESTEIN, M ;

YARIV, A .

APPLIED PHYSICS LETTERS, 1985, 47 (05) :445-447

[22]

SZE SM, 1988, VLSI TECHNOLOGY, pCH4

[23] HIGH-POWER ALGAAS/GAAS SINGLE QUANTUM-WELL LASERS WITH CHEMICALLY ASSISTED ION-BEAM ETCHED MIRRORS [J].

TIHANYI, P ;

WAGNER, DK ;

ROZA, AJ ;

VOLLMER, HJ ;

HARDING, CM ;

DAVIS, RJ ;

WOLF, ED .

APPLIED PHYSICS LETTERS, 1987, 50 (23) :1640-1641

[24] INGAASP/INP LASERS WITH 2 REACTIVE-ION-ETCHED MIRROR FACETS [J].

VANGURP, GJ ;

JACOBS, JM ;

BINSMA, JJM ;

TIEMEIJER, LF .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (07) :L1236-L1238

[25] INGAASP 400X200-MU-M ACTIVE CROSSPOINT SWITCH OPERATING AT 1.5-MU-M USING NOVEL REFLECTIVE Y-COUPLER COMPONENTS [J].

WHITE, IH ;

WATTS, JJS ;

CARROLL, JE ;

ARMISTEAD, CJ ;

MOULE, DJ ;

CHAMPELOVIER, JA .

ELECTRONICS LETTERS, 1990, 26 (10) :617-618

[26]

WILLIAMS RE, 1984, GALLIUM ARSENIDE PRO, P1216

[27] INGAASP/INP BURIED-HETEROSTRUCTURE LASERS WITH CONCURRENT FABRICATION OF THE STRIPES AND MIRRORS [J].

YAP, D ;

WALPOLE, JN ;

LIAU, ZL .

APPLIED PHYSICS LETTERS, 1988, 53 (14) :1260-1262

[28] GAIN SPECTRA OF QUANTUM WIRES WITH INHOMOGENEOUS BROADENING [J].

ZAREM, H ;

VAHALA, K ;

YARIV, A .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1989, 25 (04) :705-712

[29]

ZIEMER RE, 1975, PRINCIPLES COMMUNICA, P45

[30]

1985, SURFACE TEXTURE SURF, P30

← 1 2 3 4 →