STUDIES AND CALIBRATION OF THE DISPLACEMENTS OF A PIEZOELECTRIC TUBE USED IN THE SCANNING SYSTEM OF SCANNING TUNNELING MICROSCOPE

被引：4

作者：

DUFOUR, JP

BOURILLOT, E

GOUDONNET, JP

机构：

来源：

JOURNAL DE PHYSIQUE III | 1991年 / 1卷 / 07期

关键词：

D O I：

10.1051/jp3:1991193

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Displacements of piezoelectric tube used in scanning system of tunneling microscopes have been studied both experimentally and theoretically. Coupling between x, y and z displacements is shown as well as the technique to overcome it.

引用

页码：1337 / 1348

页数：12

共 13 条

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