MODIFYING STRUCTURE AND PROPERTIES OF OPTICAL FILMS BY COEVAPORATION

被引：83

作者：

FELDMAN, A

FARABAUGH, EN

HALLER, WK

SANDERS, DM

STEMPNIAK, RA

机构：

[1] UNIV CALIF LAWRENCE LIVERMORE NATL LAB, LIVERMORE, CA 94550 USA

[2] INST TECNOL AERONAUT, SAO PAULO, BRAZIL

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573610

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2969 / 2974

页数：6

共 38 条

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