PHYSICOCHEMICAL PROPERTIES OF DIMETHYLZINC, DIMETHYLCADMIUM AND DIETHYLZINC

被引：17

作者：

KUNIYA, Y ^{[1
]}

DEGUCHI, Y ^{[1
]}

ICHIDA, M ^{[1
]}

机构：

[1] TOSOH CORP,TOKYO RES CTR,KANAGAWA 252,JAPAN

来源：

APPLIED ORGANOMETALLIC CHEMISTRY | 1991年 / 5卷 / 04期

关键词：

ORGANOMETALLIC; VAPOR PRESSURE; DECOMPOSITION; METAL VAPOR DEPOSITION;

D O I：

10.1002/aoc.590050419

中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

摘要：

Physicochemical properties of dimethylzinc, dimethylcadmium and diethylzinc have been investigated by means of vapor pressure measurement, mass spectroscopy and gas chromatography. The saturated vapor pressure-temperature dependence of these alkyl organomethallics was determined to be as follows for dimethyl zinc: log P ((sub.)Torr) = -1.752 x 10(3)/T + 8.603 log P ((evap.)Torr) = -1.461 x 10(3)/T + 7.429 For dimethylcadmium: log P ((sub.)Torr) = -2.080 x 10(3)/T + 8.588 log P ((evap.)Torr) = -1.843 x 10(3)/T + 7.715 For diethylzinc: log P ((evap.)Torr) = -2.012 x 10(3)/T + 7.996 The temperature ranges for vapor phase decomposition for deposition of each metal were clarified, and vapor-phase species released in the decompositions were investigated. These investigations on the organometallics are to provide basic material data for the establishment of organometallic chemical vapor deposition techniques for Group IIB-VI compounds.

引用

页码：337 / 347

页数：11

共 34 条

[1] Experimental determination of steam pressure curves of fluid cadmium and zinc and calculation of chemical constants of cadmium, zinc and monoatomic bromide [J].