SILICON-NITRIDE DERIVED FROM AN ORGANOMETALLIC POLYMERIC PRECURSOR - PREPARATION AND CHARACTERIZATION

被引:38
作者
SCHMIDT, WR
SUKUMAR, V
HURLEY, WJ
GARCIA, R
DOREMUS, RH
INTERRANTE, LV
RENLUND, GM
机构
[1] RENSSELAR POLYTECH INST,DEPT CHEM,TROY,NY 12180
[2] GE,CORP RES & DEV,SCHENECTADY,NY 12301
关键词
polymer; precursor; pyrolysis; silicon nitride; surface area;
D O I
10.1111/j.1151-2916.1990.tb07606.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Partially crystalline Si3N4, with nanosized crystals and a specific surface area greater than 200 m2/g, is obtained by pyrolysis of a commercially available vinylic polysilane in a stream of anhydrous NH3 to 1000°C. This polymer does not contain N initially. Crystallization to high‐purity α‐Si3N4 proceeds with additional heating above 1400°C under N2. The changes in crystallinity, powder morphology, infrared spectra, and elemental compositions, for samples annealed from 1000° to 1600°C under N2, are consistent with an amorphous‐to‐crystalline transformation. Although macroscopic consolidation and local densification occur at 1400°C, volatilization and accompanying weight loss limit bulk densification. The effect of temperature on specific surface area is examined and related to the sintering process. These results are applicable to pyrolysis, decomposition, and crystallization studies of ceramics synthesized by polymeric precursor routes. Copyright © 1990, Wiley Blackwell. All rights reserved
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页码:2412 / 2418
页数:7
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