THERMODYNAMICS OF THE SI-N-O SYSTEM AND KINETIC MODELING OF OXIDATION OF SI3N4

被引：95

作者：

DU, HH

TRESSLER, RE

SPEAR, KE

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 11期

关键词：

D O I：

10.1149/1.2096427

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：3210 / 3215

页数：6

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