OXIDATION STUDIES OF CRYSTALLINE CVD SILICON-NITRIDE

被引：191

作者：

DU, HH

TRESSLER, RE

SPEAR, KE

PANTANO, CG

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 05期

关键词：

D O I：

10.1149/1.2096955

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1527 / 1536

页数：10

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