INTERACTION OF EVAPORATED COPPER WITH VAPOR-DEPOSITED THIN POLYIMIDE FILMS

被引：23

作者：

STRUNSKUS, T ^{[1
]}

HAHN, C ^{[1
]}

FRANKEL, D ^{[1
]}

GRUNZE, M ^{[1
]}

机构：

[1] UNIV HEIDELBERG, INST ANGEW PHYS CHEM, W-6900 HEIDELBERG, GERMANY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1991年 / 9卷 / 03期

关键词：

D O I：

10.1116/1.577611

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The interaction of evaporated copper deposits with vapor-deposited, vacuum-cured thin films of pyromellitic dianhydride-oxydianiline (PMDA-ODA) polyimide was studied using x-ray photoelectron spectroscopy (XPS) and Fourier transform infrared reflection absorption spectroscopy (FTIRAS). XPS and FTIRAS measurements indicate a preferential interaction of the copper with the imide part of the molecule, some interaction with the ODA ether oxygen and only a weak interaction with the phenyl rings. The spectral changes observed show a dependence on the rate of the copper deposition.

引用

页码：1272 / 1277

页数：6

共 19 条

[1]

CHOU NJ, 1984, J VAC SCI TECHNOL A, V2, P751, DOI 10.1116/1.572564

[2] APPLICATION OF ESCA TO POLYMER CHEMISTRY .16. ELECTRON MEAN FREE PATHS AS A FUNCTION OF KINETIC-ENERGY IN POLYMERIC FILMS DETERMINED BY MEANS OF ESCA [J].

CLARK, DT ;

THOMAS, HR .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1977, 15 (12) :2843-2867

[3]

DOMINGUE A, 1990, ACS SYM SER, V440, P272

[4] INFRARED SPECTROSCOPIC STUDY OF CR AND CU METALLIZATION OF POLYIMIDE [J].

DUNN, DS ;

GRANT, JL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02) :253-255

[5]

GRUNZE M, 1990, IN PRESS 2ND P S MET

[6]

HAHN PO, 1985, MATER RES SOC S P, V40, P252

[7] COMPLEX-FORMATION AND GROWTH AT THE CR-POLYIMIDE AND CU-POLYIMIDE INTERFACE [J].

HAIGHT, R ;

WHITE, RC ;

SILVERMAN, BD ;

HO, PS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2188-2199

[8] CHEMICAL BONDING AND REACTION AT METAL POLYMER INTERFACES [J].

HO, PS ;

HAHN, PO ;

BARTHA, JW ;

RUBLOFF, GW ;

LEGOUES, FK ;

SILVERMAN, BD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :739-745

[9]

IIJIMA M, 1985, J VAC SOC JPN, V28, P437

[10] THE MICROSTRUCTURE OF METAL POLYIMIDE INTERFACES [J].

LEGOUES, FK ;

SILVERMAN, BD ;

HO, PS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2200-2204

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