THE MICROSTRUCTURE OF METAL POLYIMIDE INTERFACES

被引:105
作者
LEGOUES, FK
SILVERMAN, BD
HO, PS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期
关键词
D O I
10.1116/1.575011
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2200 / 2204
页数:5
相关论文
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