LOCAL BONDING STRUCTURE OF DEUTERIUM IN SINGLE-CRYSTAL SILICON DETERMINED BY NUCLEAR-MAGNETIC-RESONANCE

Nuclear magnetic resonance was used to determine the local structure of deuterium in single-crystal silicon. The deuterium was introduced by hydrogenation and incorporated in hydrogen-induced extended planar defects. The spectrum consists of two components: a narrow doublet and a broad central line. The splitting and orientational dependence of the doublet establish that it arises from D bonded to Si with the Si-D bonds aligned along the [111] directions. The broad central line is similar to that observed in hydrogenated amorphous silicon and may arise from motionally inhibited D2 in the dilated region of the hydrogen-induced platelets.