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ACTIVATION ENERGIES IN CHEMICAL ETCHING OF SEMICONDUCTORS IN HNO3-HF-CH3COOH
被引:24
作者
:
BOGENSCHUTZ, AF
论文数:
0
引用数:
0
h-index:
0
BOGENSCHUTZ, AF
KRUSEMARK, W
论文数:
0
引用数:
0
h-index:
0
KRUSEMARK, W
LOCHERER, KH
论文数:
0
引用数:
0
h-index:
0
LOCHERER, KH
MUSSINGER, W
论文数:
0
引用数:
0
h-index:
0
MUSSINGER, W
机构
:
来源
:
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
|
1967年
/ 114卷
/ 09期
关键词
:
D O I
:
10.1149/1.2426794
中图分类号
:
O646 [电化学、电解、磁化学];
学科分类号
:
081704 ;
摘要
:
引用
收藏
页码:970 / +
页数:1
相关论文
共 13 条
[1]
ETCHING GE WITH MIXTURES OF HF-H2O2-H2O
BLOEM, J
论文数:
0
引用数:
0
h-index:
0
BLOEM, J
VANVESSEM, JC
论文数:
0
引用数:
0
h-index:
0
VANVESSEM, JC
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(01)
: 33
-
36
[2]
BOGENSCHUTZ AF, 1964, METALLOBERFLACHE, V18, P193
[3]
CHEMICAL ETCHING OF GERMANIUM IN HF-HNO3-H2O SOLUTIONS
BURGESS, TE
论文数:
0
引用数:
0
h-index:
0
BURGESS, TE
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(04)
: 341
-
342
[4]
A STUDY OF THE ETCHING RATE OF SINGLE-CRYSTAL GERMANIUM
CAMP, PR
论文数:
0
引用数:
0
h-index:
0
CAMP, PR
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1955,
102
(10)
: 586
-
593
[5]
DISSOLUTION OF GERMANIUM IN AQUEOUS HYDROGEN PEROXIDE SOLUTION
CERNIGLIA, N
论文数:
0
引用数:
0
h-index:
0
CERNIGLIA, N
WANG, P
论文数:
0
引用数:
0
h-index:
0
WANG, P
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(06)
: 508
-
512
[6]
EUCKEN A, 1949, LEHRBUCH CHEMISCHEN, V2, P910
[7]
The reaction rate theory of viscosity and some of its applications
Ewell, RH
论文数:
0
引用数:
0
h-index:
0
机构:
Purdue Univ, Dept Chem, Lafayette, IN USA
Purdue Univ, Dept Chem, Lafayette, IN USA
Ewell, RH
[J].
JOURNAL OF APPLIED PHYSICS,
1938,
9
(04)
: 252
-
269
[8]
Viscosity, plasticity, and diffusion as examples of absolute reaction rates
Eyring, H
论文数:
0
引用数:
0
h-index:
0
机构:
Princeton Univ, Princeton, NJ USA
Princeton Univ, Princeton, NJ USA
Eyring, H
[J].
JOURNAL OF CHEMICAL PHYSICS,
1936,
4
(04)
: 283
-
291
[9]
ILSCHNER B, 1966, Z METALLKD, V57, P194
[10]
CONTROLLED ETCHING OF SILICON IN THE HF-HNO3 SYSTEM
KLEIN, DL
论文数:
0
引用数:
0
h-index:
0
KLEIN, DL
DSTEFAN, DJ
论文数:
0
引用数:
0
h-index:
0
DSTEFAN, DJ
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(01)
: 37
-
42
←
1
2
→
共 13 条
[1]
ETCHING GE WITH MIXTURES OF HF-H2O2-H2O
BLOEM, J
论文数:
0
引用数:
0
h-index:
0
BLOEM, J
VANVESSEM, JC
论文数:
0
引用数:
0
h-index:
0
VANVESSEM, JC
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(01)
: 33
-
36
[2]
BOGENSCHUTZ AF, 1964, METALLOBERFLACHE, V18, P193
[3]
CHEMICAL ETCHING OF GERMANIUM IN HF-HNO3-H2O SOLUTIONS
BURGESS, TE
论文数:
0
引用数:
0
h-index:
0
BURGESS, TE
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(04)
: 341
-
342
[4]
A STUDY OF THE ETCHING RATE OF SINGLE-CRYSTAL GERMANIUM
CAMP, PR
论文数:
0
引用数:
0
h-index:
0
CAMP, PR
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1955,
102
(10)
: 586
-
593
[5]
DISSOLUTION OF GERMANIUM IN AQUEOUS HYDROGEN PEROXIDE SOLUTION
CERNIGLIA, N
论文数:
0
引用数:
0
h-index:
0
CERNIGLIA, N
WANG, P
论文数:
0
引用数:
0
h-index:
0
WANG, P
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(06)
: 508
-
512
[6]
EUCKEN A, 1949, LEHRBUCH CHEMISCHEN, V2, P910
[7]
The reaction rate theory of viscosity and some of its applications
Ewell, RH
论文数:
0
引用数:
0
h-index:
0
机构:
Purdue Univ, Dept Chem, Lafayette, IN USA
Purdue Univ, Dept Chem, Lafayette, IN USA
Ewell, RH
[J].
JOURNAL OF APPLIED PHYSICS,
1938,
9
(04)
: 252
-
269
[8]
Viscosity, plasticity, and diffusion as examples of absolute reaction rates
Eyring, H
论文数:
0
引用数:
0
h-index:
0
机构:
Princeton Univ, Princeton, NJ USA
Princeton Univ, Princeton, NJ USA
Eyring, H
[J].
JOURNAL OF CHEMICAL PHYSICS,
1936,
4
(04)
: 283
-
291
[9]
ILSCHNER B, 1966, Z METALLKD, V57, P194
[10]
CONTROLLED ETCHING OF SILICON IN THE HF-HNO3 SYSTEM
KLEIN, DL
论文数:
0
引用数:
0
h-index:
0
KLEIN, DL
DSTEFAN, DJ
论文数:
0
引用数:
0
h-index:
0
DSTEFAN, DJ
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(01)
: 37
-
42
←
1
2
→