THE DEDUCTION OF SPATIALLY-VARIABLE EFFECTIVE DIFFUSIVITY FROM BALLISTIC ATOMIC MIXING STUDIES

被引：6

作者：

CARTER, G

KATARDJIEV, IV

NOBES, MJ

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 43卷 / 02期

关键词：

D O I：

10.1016/0168-583X(89)90028-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：149 / 152

页数：4

共 12 条

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[2]

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[3] THE DEDUCTION OF BALLISTIC ATOMIC MIXING RATES FROM HIGH FLUENCE ION IMPLANT COLLECTION DEPTH DISTRIBUTIONS [J].

CARTER, G ;

NOBES, MJ ;

KATARDJIEV, IV .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 36 (04) :404-411

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[5] THE DIFFUSION-APPROXIMATION IN ATOMIC MIXING [J].

COLLINS, R ;

MARSH, T ;

JIMENEZRODRIGUEZ, JJ .

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[6] ATOMIC MIXING IN THE DEPTH-DEPENDENT DIFFUSION-APPROXIMATION [J].

COLLINS, R ;

JIMENEZRODRIGUEZ, JJ .

RADIATION EFFECTS LETTERS, 1982, 68 (01) :19-23

[7] A MODEL FOR ATOMIC MIXING AND PREFERENTIAL SPUTTERING EFFECTS IN SIMS DEPTH PROFILING [J].

KING, BV ;

TSONG, IST .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (04) :1443-1447

[8] IMPLANT PROFILE COMPUTATION WITH DEPTH-DEPENDENT DIFFUSION [J].

MARSH, T ;

COLLINS, R ;

JIMENEZRODRIGUEZ, JJ .

RADIATION EFFECTS LETTERS, 1982, 68 (01) :1-5

[9]

MATTESON S, 1980, THIN FILM INTERFACES, P242

[10]

PAINE BM, 1989, BEAM MODIFICATIONS M, V3, P153

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