THE DEDUCTION OF BALLISTIC ATOMIC MIXING RATES FROM HIGH FLUENCE ION IMPLANT COLLECTION DEPTH DISTRIBUTIONS

被引：8

作者：

CARTER, G

NOBES, MJ

KATARDJIEV, IV

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 36卷 / 04期

关键词：

D O I：

10.1016/0168-583X(89)90343-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：404 / 411

页数：8

共 12 条

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[7] THEORETICAL TREATMENT OF CASCADE MIXING IN DEPTH PROFILING BY SPUTTERING [J].

HOFER, WO ;

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[8] ION-BEAM MIXING IN AMORPHOUS-SILICON .2. THEORETICAL INTERPRETATION [J].

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[9]

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