MASS-TRANSPORT IN A CZOCHRALSKI PULLER WITH A STRONG MAGNETIC-FIELD

被引：12

作者：

HJELLMING, LN

WALKER, JS

机构：

[1] Univ of Illinois, Urbana, IL, USA, Univ of Illinois, Urbana, IL, USA

来源：

JOURNAL OF CRYSTAL GROWTH | 1987年 / 85卷 / 1-2期

关键词：

CRYSTALS - Growing - Magnetic field effects - Mass transfer - Oxygen;

D O I：

10.1016/0022-0248(87)90200-4

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

This paper treats the mass transport of oxygen in a Czochralski silicon crystal puller with an extremely strong, uniform, axial magnetic field. The problem is intrinsically unsteady and the oxygen concentration of a crystallizing particle depends on its trajectory since the beginning of crystal growth. The results provide the base solution for the mass transport problem with much weaker magnetic fields.

引用

页码：25 / 31

页数：7

共 5 条

[1] MELT MOTION IN A CZOCHRALSKI CRYSTAL PULLER WITH AN AXIAL MAGNETIC-FIELD - ISOTHERMAL MOTION [J].