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A MULTIPURPOSE QUADRUPOLE MASS-SPECTROMETER DETECTOR FOR SURFACE KINETIC AND ABSOLUTE SURFACE COVERAGE MEASUREMENTS

被引：71
作者：
SMENTKOWSKI, VS
YATES, JT
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 06期
关键词：
D O I：
10.1116/1.576144
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：3325 / 3331
页数：7
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