DIAMONDLIKE CARBON-FILM DEPOSITION USING A REACTIVE PULSED ELECTROMAGNETIC INDUCTIVE PLASMA PROCESS

被引：9

作者：

EBIHARA, K ^{[1
]}

IKEGAMI, T ^{[1
]}

MATSUMOTO, T ^{[1
]}

NISHIMOTO, H ^{[1
]}

MAEDA, S ^{[1
]}

HARADA, K ^{[1
]}

机构：

[1] DENKI KOGYO CO LTD,CHIYODA KU,TOKYO 100,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 10期

关键词：

D O I：

10.1063/1.343772

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：4996 / 5000

页数：5

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