PREPARATION AND PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON FILMS BY GLOW-DISCHARGE DECOMPOSITION OF SILANE IN CASCADE REACTORS

被引：7

作者：

DIXIT, PN

BHATTACHARYA, R

PANWAR, OS

SHAH, VV

机构：

来源：

关键词：

D O I：

10.1063/1.94623

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：991 / 993

页数：3

共 15 条

[1] AMORPHOUS SILICON SOLAR-CELL
CARLSON, DE
WRONSKI, CR
[J]. APPLIED PHYSICS LETTERS, 1976, 28 (11) : 671 - 673
[2] CARLSON DE, 1977, Patent No. 4064521
[3] CHARACTERIZATION OF GLOW-DISCHARGE DEPOSITED A-SI-H
FRITZSCHE, H
[J]. SOLAR ENERGY MATERIALS, 1980, 3 (04): : 447 - 501
[4] ON LIGHT-INDUCED EFFECT IN AMORPHOUS HYDROGENATED SILICON
GUHA, S
NARASIMHAN, KL
PIETRUSZKO, SM
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (02) : 859 - 860
[5] ANNEALING EFFECTS ON RELATIONSHIPS BETWEEN ELECTRON-SPIN-RESONANCE, ELECTRICAL AND OPTICAL-PROPERTIES IN A-SI - H
HASEGAWA, S
IMAI, Y
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 45 (03): : 347 - 360
[6] KNIGHTS JC, 1976, AIP C P, V31, P296
[7] Le Comber P. G., 1972, Journal of Non-Crystalline Solids, V11, P219, DOI 10.1016/0022-3093(72)90004-X
[8] AMORPHOUS-SILICON FIELD-EFFECT DEVICE AND POSSIBLE APPLICATION
LECOMBER, PG
SPEAR, WE
GHAITH, A
[J]. ELECTRONICS LETTERS, 1979, 15 (06) : 179 - 181
[9] Loveland R. J., 1973, Journal of Non-Crystalline Solids, V13, P55, DOI 10.1016/0022-3093(73)90035-5
[10] SPUTTERED HYDROGENATED AMORPHOUS SILICON
MOUSTAKAS, TD
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (03) : 391 - 435