REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION STUDY OF GROWTH AND INTERFACE FORMATION OF THE GA1-XINXSB/INAS STRAINED-LAYER SUPERLATTICES

被引:4
作者
FAN, WC [1 ]
ZBOROWSKI, JT [1 ]
GOLDING, TD [1 ]
SHIH, HD [1 ]
机构
[1] UNIV HOUSTON,CTR SPACE VACUUM EPITAXY,HOUSTON,TX 77204
关键词
D O I
10.1063/1.351394
中图分类号
O59 [应用物理学];
学科分类号
摘要
Growth and interface formation of the Ga1-xInxSb/InAs (x less-than-or-equal-to 0.4) strained-layer superlattices (SLSs) on GaSb(100) substrates have been studied by the reflection high-energy electron diffraction (RHEED) during molecular beam epitaxy. A number of surface atomic structures were observed in the growth of the SLS: a (1 x 3) phases from the InAs epilayer surface; a (2 x 3) phase, a (2 x 4) phase and diffuse (1 x 1)-like phases from the InAs epilayer surface. The RHEED intensity variations in the formation of the interfaces have been discussed in terms of interface chemical reactions.
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页码:2249 / 2252
页数:4
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