INTEGRATED OPTICAL WAVE-GUIDES IN POLYIMIDE FOR WAFER SCALE INTEGRATION

The limitations of electrical interconnections for wafer-scale integration and wafer-scale hybrid packaging due to their length are briefly described. The fabrication of low-loss integrated optical waveguides using optically transparent polymide both as an embedding material and as the waveguide dielectric itself is discussed. The feasibility of using a focused ion beam (FIB) to micromachine mirrors is discussed and compared to other techniques for fabricating such structures.