EXPERIMENTAL AND COMPUTER STUDY OF THE SPATIAL DISTRIBUTIONS OF PARTICLES SPUTTERED FROM POLYCRYSTALS

被引：12

作者：

DODONOV, AI ^{[1
]}

FAYAZOV, IM ^{[1
]}

FEDOROVICH, SD ^{[1
]}

KRYLOVA, EA ^{[1
]}

MASKOVA, ES ^{[1
]}

MOLCHANOV, VA ^{[1
]}

ECKSTEIN, W ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 49卷 / 03期

关键词：

D O I：

10.1007/BF00616858

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：299 / 304

页数：6

共 14 条

ROOSENDAAL, HE ;

SANDERS, JB .

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SHULGA, VI .

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[13]

SHULGA VI, 1985, RADIAT EFF, V85, P1

[14] MECHANISMS AND THEORY OF PHYSICAL SPUTTERING BY PARTICLE IMPACT [J].

SIGMUND, P .