DIRECT OBSERVATION OF THE DEFECT STRUCTURE OF POLYCRYSTALLINE DIAMOND BY SCANNING ELECTRON-MICROSCOPY

被引:9
作者
HARKER, AB [1 ]
DENATALE, JF [1 ]
FLINTOFF, JF [1 ]
BREEN, JJ [1 ]
机构
[1] INDIANA UNIV PURDUE UNIV,DEPT CHEM,INDIANAPOLIS,IN 46205
关键词
D O I
10.1063/1.109152
中图分类号
O59 [应用物理学];
学科分类号
摘要
A method has been demonstrated to directly observe the surface crystallography and defect structures in diamond films by scanning electron microscopy. Individual diamond crystals in the polycrystalline films are polished to a rms smoothness of less than 2 nm using iron metal at temperatures in excess of 725-degrees-C. In the absence of topography, the detailed microstructure of the films can be characterized by secondary electron imaging in a scanning electron microscope by charge-induced electron contrast which shows strong beam voltage dependence. It is hypothesized that defects and grain boundaries form a connected pathway in the film which has greater conductivity than the generally insulating diamond and creates the charge-induced contrast.
引用
收藏
页码:3105 / 3107
页数:3
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