REWRITABLE CAPACITANCE DISK MEMORY WITH FERROELECTRIC-SEMICONDUCTOR STRUCTURE

被引:11
作者
YAMAMOTO, R
SAKADA, K
UMEMURA, S
机构
[1] Miyanodai Technology Development Center, Fuji Photo Film Co. Ltd., Ashigarakami-gun, Kanagawa, 258, 798 Miyanodai, Kaisei-machi
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 10期
关键词
FERROELECTRICS; SEMICONDUCTOR; REWRITABLE; DISK MEMORY; VINYLIDENEFLUORIDE-TRIFLUOROETHYLENE; SUBMICRON BIT RECORDING;
D O I
10.1143/JJAP.33.5829
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper presents a new rewritable capacitance disk memory with a ferroelectric-semiconductor structure. The ferroelectric film of the medium was poled in the perpendicular direction to generate depletion capacitance for data recording. Capacitance between the stylus head and the medium was detected for data reproduction. The amount of change in capacitance due to the poling direction showed that the recording density of this memory system could be more than 1 Gbit/cm(2). Evaluation equipment was constructed for dynamic bit recording and reproduction, in which the mobile stylus head was in contact with the medium surface. It was confirmed that data bits with 0.4 mu m spatial wavelength could be recorded and reproduced. In our experiment, recording density was mostly determined by the stylus size, and its limit was also estimated by the numerical simulation of ferroelectric semiconductor structure.
引用
收藏
页码:5829 / 5837
页数:9
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