MICROSTRUCTURAL ORIGIN OF THE PERPENDICULAR ANISOTROPY IN M-TYPE BARIUM HEXAFERRITE THIN-FILMS DEPOSITED BY RF MAGNETRON SPUTTERING

被引:65
作者
SUI, XY [1 ]
KRYDER, MH [1 ]
WONG, BY [1 ]
LAUGHLIN, DE [1 ]
机构
[1] CARNEGIE MELLON UNIV,DEPT MAT SCI & ENGN,PITTSBURGH,PA 15213
关键词
D O I
10.1109/20.281291
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Barium hexaferrite thin films deposited by rf magnetron sputtering have been made which exhibit saturation magnetization 90% of that of bulk single crystals, whereas the perpendicular uniaxial anisotropy is only 60% of that of the bulk. X-ray diffraction spectra suggest good c-axis orientation perpendicular to the film plane. However, M-H hysteresis loops show a fairly large in-plane hysteresis. Scanning electron microscopy and transmission electron microscopy show that the films are made of a mixture of platelet-shaped grains and acicular grains. Microdiffraction studies in a transmission electron microscope indicate that the platelets have their c-axis oriented perpendicular to the plane and that the acicular grains have c-axis orientation in the plane. Preferential grain growth in the basal plane of the crystal is believed to be responsible for these grain geometries. Because the platelets occupy a much larger volume of the film than the acicular particles, there is a preferential c-axis orientation perpendicular to the film plane.
引用
收藏
页码:3751 / 3753
页数:3
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