PREPARATION OF BA-FERRITE FILMS FOR PERPENDICULAR MAGNETIC RECORDING BY RF TARGETS FACING TYPE OF SPUTTERING

被引：37

作者：

MATSUOKA, M

HOSHI, Y

NAOE, M

YAMANAKA, S

机构：

[1] Tokyo Inst of Technology, Faculty of, Engineering, Tokyo, Jpn, Tokyo Inst of Technology, Faculty of Engineering, Tokyo, Jpn

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1984年 / 20卷 / 05期

关键词：

D O I：

10.1109/TMAG.1984.1063361

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

6

引用

收藏

页码：800 / 802

页数：3

相关论文

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[3] Maissel L.I., 1970, HDB THIN FILM TECHNO
[4] FORMATION OF BA-FERRITE FILMS WITH PERPENDICULAR MAGNETIZATION BY TARGETS-FACING TYPE OF SPUTTERING
MATSUOKA, M
HOSHI, Y
NAOE, M
YAMANAKA, S
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1982, 18 (06) : 1119 - 1121
[5] FACING TARGETS TYPE OF SPUTTERING METHOD FOR DEPOSITION OF MAGNETIC METAL-FILMS AT LOW-TEMPERATURE AND HIGH-RATE
NAOE, M
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HOSHI, Y
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1980, 16 (05) : 646 - 648
[6] NAOE M, 1981, IEEE T MAGN, V17, P3184, DOI 10.1109/TMAG.1981.1061729