CALCULATION OF ION BOMBARDING ENERGY AND ITS DISTRIBUTION IN RF SPUTTERING

被引：114

作者：

TSUI, RTC

机构：

来源：

PHYSICAL REVIEW | 1968年 / 168卷 / 01期

关键词：

D O I：

10.1103/PhysRev.168.107

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

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页码：107 / &

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