EFFECTS OF LOW-ENERGY LOW-FLUX ION-BOMBARDMENT ON THE PROPERTIES OF VO2 THIN-FILMS

被引:18
作者
CASE, FC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 03期
关键词
D O I
10.1116/1.576252
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:1194 / 1198
页数:5
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