FLUX MEASUREMENT OF A HYPERTHERMAL ATOMIC OXYGEN BEAM

被引：7

作者：

DAVIDSON, MR ^{[1
]}

HOFLUND, GB ^{[1
]}

OUTLAW, RA ^{[1
]}

机构：

[1] NASA,LANGLEY RES CTR,HAMPTON,VA 23665

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 01期

关键词：

D O I：

10.1116/1.578714

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A method has been developed and is described for measuring the flux of a beam of hyperthermal oxygen atoms using a quadrupole mass spectrometer. The accuracy of this method has been assessed by adsorbing the O atom flux on a Au surface for a specified period of time and quantifying the adsorbed amount using ion scattering spectroscopy and by estimating the oxygen-atom flux from the electron stimulated desorption parameters used to produce the oxygen-atom beam.

引用

页码：264 / 266

页数：3

共 8 条

[1] THE ADSORPTION OF OXYGEN ON GOLD [J].