ION-IMPLANTATION OF SPUTTERED Y-BA-CU-O FILMS

被引：11

作者：

RUBIN, M

BROWN, IG

YIN, E

WRUCK, D

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 08期

关键词：

D O I：

10.1063/1.344023

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3940 / 3942

页数：3

共 16 条

[1] PREPARATION OF YBA2CU3O7-X SUPERCONDUCTING THIN-FILMS BY RF-MAGNETRON SPUTTERING [J].

AIDA, T ;

FUKAZAWA, T ;

TAKAGI, K ;

MIYAUCHI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09) :L1489-L1491

[2] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].

BIERSACK, JP ;

ECKSTEIN, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94

[3] MULTIPLY STRIPPED ION GENERATION IN THE METAL VAPOR VACUUM-ARC [J].

BROWN, IG ;

FEINBERG, B ;

GALVIN, JE .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) :4889-4898

[4] HIGH-CURRENT ION-SOURCE [J].

BROWN, IG ;

GAVIN, JE ;

MACGILL, RA .

APPLIED PHYSICS LETTERS, 1985, 47 (04) :358-360

[5] REACTIVE MAGNETRON SPUTTERING OF THIN-FILM SUPERCONDUCTOR YBA2CU3O7-CHI [J].

CHAR, K ;

KENT, AD ;

KAPITULNIK, A ;

BEASLEY, MR ;

GEBALLE, TH .

APPLIED PHYSICS LETTERS, 1987, 51 (17) :1370-1372

[6] EFFECTS OF RADIATION-DAMAGE IN ION-IMPLANTED THIN-FILMS OF METAL-OXIDE SUPERCONDUCTORS [J].

CLARK, GJ ;

MARWICK, AD ;

KOCH, RH ;

LAIBOWITZ, RB .

APPLIED PHYSICS LETTERS, 1987, 51 (02) :139-141

[7] ION-BEAM AMORPHIZATION OF YBA2CU3OX [J].

CLARK, GJ ;

LEGOUES, FK ;

MARWICK, AD ;

LAIBOWITZ, RB ;

KOCH, R .

APPLIED PHYSICS LETTERS, 1987, 51 (18) :1462-1464

[8] QUANTUM INTERFERENCE DEVICES MADE FROM SUPERCONDUCTING OXIDE THIN-FILMS [J].

KOCH, RH ;

UMBACH, CP ;

CLARK, GJ ;

CHAUDHARI, P ;

LAIBOWITZ, RB .

APPLIED PHYSICS LETTERS, 1987, 51 (03) :200-202

[9] Y-BA-CU-O FILMS BY RF MAGNETRON SPUTTERING USING SINGLE COMPOSITE TARGETS - SUPERCONDUCTING AND STRUCTURAL-PROPERTIES [J].

LIOU, SH ;

HONG, M ;

KWO, J ;

DAVIDSON, BA ;

CHEN, HS ;

NAKAHARA, S ;

BOONE, T ;

FELDER, RJ .

APPLIED PHYSICS LETTERS, 1988, 52 (20) :1735-1737

[10] ION-IMPLANTATION AND THERMAL ANNEALING OF SINGLE-CRYSTALS OF THE TYPE-YBA2CU3OX [J].

MCCALLUM, JC ;

WHITE, CW ;

BOATNER, LA .

MATERIALS LETTERS, 1988, 6 (11-12) :374-378

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