DEPTH PROFILES OF CARBON, NITROGEN AND OXYGEN ON CARBON-COATED STEEL SURFACES MADE BY ION-BEAM-ASSISTED DEPOSITION

The application of Bragg-curve spectroscopy to elastic recoil detection analysis (ERDA) of carbon layers deposited onto steel surfaces by ion beam assisted deposition is described. ERDA is used for simultaneous depth profiling of the light elements carbon, nitrogen and oxygen. Typical results are good selectivity of the atomic charge number Z up to 20 with a depth resolution on the order of 5-10 nm and submonolayer sensitivity. The low background in the operative region allows the analysis of profiles down to concentrations of about 0.01% of the stoichiometric concentrations. The depth profiling results of differently produced carbon layers are shown in correlation with the measured wear resistance and the technological parameters of the ion beam assisted deposition process.