STUDY OF CARBON DEPTH DISTRIBUTIONS IN HARD COATINGS PRODUCED BY C+ IMPLANTATION

被引：8

作者：

NEELMEIJER, C

HENSEL, E

KNOTHE, P

POSSELT, M

RICHTER, E

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 42卷 / 03期

关键词：

D O I：

10.1016/0168-583X(89)90448-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：369 / 374

页数：6

共 14 条

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