CRYSTALLIZATION OF CARBON-FILMS BY ION-BEAM ASSIST TECHNOLOGY

被引：47

作者：

OGATA, K

ANDOH, Y

KAMIJO, E

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90660-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：685 / 688

页数：4

共 10 条

[1] PROPERTIES OF BORON-NITRIDE COATING FILMS PREPARED BY THE ION-BEAM AND VAPOR-DEPOSITION METHOD (IVD) [J].

ANDOH, Y ;

OGATA, K ;

SUZUKI, Y ;

KAMIJO, E ;

SATOU, M ;

FUJIMOTO, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :787-790

[2] A NEW MACHINE FOR FILM FORMATION BY ION AND VAPOR-DEPOSITION [J].

ANDOH, Y ;

SUZUKI, Y ;

MATSUDA, K ;

SATOU, M ;

FUJIMOTO, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :111-115

[3]

EVERSOLE EG, 1884, Patent No. 303188

[4]

Eversole W. G., 1962, US Patent, Patent No. [3,030,187, 3030187]

[5] 2-PHONON INFRA-RED LATTICE ABSORPTION IN DIAMOND [J].

HARDY, JR ;

SMITH, SD .

PHILOSOPHICAL MAGAZINE, 1961, 6 (69) :1163-1172

[6] DIAMOND SYNTHESIS - INTERNAL GROWTH DURING C+ ION-IMPLANTATION [J].

NELSON, RS ;

HUDSON, JA ;

MAZEY, DJ ;

PILLER, RC .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1983, 386 (1790) :211-&

[7] ON THE INFLUENCE OF RESIDUAL-STRESSES AND DENSITY-FLUCTUATIONS ON THE CRYSTALLIZATION OF AMORPHOUS-CARBON FILMS [J].

POMPE, W ;

SCHEIBE, HJ ;

RICHTER, A ;

BAUER, HD ;

BEWILOGUA, K ;

WEISSMANTEL, C .

THIN SOLID FILMS, 1986, 144 (01) :77-92

[8] ABOUT THE STRUCTURE AND BONDING OF LASER GENERATED CARBON-FILMS BY RAMAN AND ELECTRON-ENERGY LOSS SPECTROSCOPY [J].

RICHTER, A ;

SCHEIBE, HJ ;

POMPE, W ;

BRZEZINKA, KW ;

MUHLING, I .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1986, 88 (01) :131-144

[9] COATING FILMS OF TITANIUM NITRIDE PREPARED BY ION AND VAPOR-DEPOSITION METHOD [J].

SATOU, M ;

ANDOH, Y ;

OGATA, K ;

SUZUKI, Y ;

MATSUDA, K ;

FUJIMOTO, F .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (06) :656-660

[10] RAMAN SPECTRUM OF DIAMOND [J].

SOLIN, SA ;

RAMDAS, AK .

PHYSICAL REVIEW B, 1970, 1 (04) :1687-&

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