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PROPERTIES OF BORON-NITRIDE COATING FILMS PREPARED BY THE ION-BEAM AND VAPOR-DEPOSITION METHOD (IVD)

被引：45
作者：
ANDOH, Y
OGATA, K
SUZUKI, Y
KAMIJO, E
SATOU, M
FUJIMOTO, F
机构：
[1] UNIV TOKYO, COLL GEN EDUC, TOKYO 153, JAPAN
[2] GOVT IND RES INST, IKEDA, OSAKA 563, JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷
关键词：
D O I：
10.1016/S0168-583X(87)80158-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：787 / 790
页数：4
相关论文
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    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 910 - 914
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