NITRIDE FILM FORMATION BY ION AND VAPOR-DEPOSITION

被引：45

作者：

SATOU, M

YAMAGUCHI, K

ANDOH, Y

SUZUKI, Y

MATSUDA, K

FUJIMOTO, F

机构：

[1] UNIV TOKYO,COLL GEN EDUC,TOKYO 153,JAPAN

[2] KYOCERA CORP,CENT RES LAB,KAGOSHIMA 89943,JAPAN

[3] NISSIN ELECT CO LTD,KYOTO 615,JAPAN

来源：

关键词：

D O I：

10.1016/0168-583X(85)90493-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：910 / 914

页数：5

共 9 条

[1] A NEW MACHINE FOR FILM FORMATION BY ION AND VAPOR-DEPOSITION
ANDOH, Y
SUZUKI, Y
MATSUDA, K
SATOU, M
FUJIMOTO, F
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) : 111 - 115
[2] NORMAL MODES IN HEXAGONAL BORON NITRIDE
GEICK, R
PERRY, CH
RUPPRECH.G
[J]. PHYSICAL REVIEW, 1966, 146 (02): : 543 - &
[3] FORMATION OF CUBIC BORON-NITRIDE FILMS BY BORON EVAPORATION AND NITROGEN ION-BEAM BOMBARDMENT
SATOU, M
FUJIMOTO, F
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (03): : L171 - L172
[4] SATOU M, 1981, P INT WORKSHOP PROFE, P349
[5] SATOU M, 1982, 6TH P S ION SOURC IO, P425
[6] ION-BEAM SYNTHESIS OF CUBIC BORON-NITRIDE
SHANFIELD, S
WOLFSON, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 323 - 325
[7] ION-BEAM DEPOSITION OF SPECIAL FILM STRUCTURES
WEISSMANTEL, C
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 179 - 185
[8] STRUCTURE AND PROPERTIES OF QUASI-AMORPHOUS FILMS PREPARED BY ION-BEAM TECHNIQUES
WEISSMANTEL, C
BEWILOGUA, K
DIETRICH, D
ERLER, HJ
HINNEBERG, HJ
KLOSE, S
NOWICK, W
REISSE, G
[J]. THIN SOLID FILMS, 1980, 72 (01) : 19 - 31
[9] THEORETICAL-STUDIES ON AN EMPIRICAL-FORMULA FOR SPUTTERING YIELD AT NORMAL INCIDENCE
YAMAMURA, Y
MATSUNAMI, N
ITOH, N
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 71 (1-2): : 65 - 86