THEORETICAL-STUDIES ON AN EMPIRICAL-FORMULA FOR SPUTTERING YIELD AT NORMAL INCIDENCE

被引：132

作者：

YAMAMURA, Y ^{[1
]}

MATSUNAMI, N ^{[1
]}

ITOH, N ^{[1
]}

机构：

[1] NAGOYA UNIV,FAC ENGN,DEPT CRYSTALLINE MAT SCI,NAGOYA,AICHI 464,JAPAN

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1983年 / 71卷 / 1-2期

关键词：

D O I：

10.1080/00337578308218604

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

Theoretical investigations on the Matsunami empirical formula for the sputterng yield are presented, and a new empirical formula is proposed. The first Matsunami empirical formula includes implicitly the effect of the inelastic stopping in one of the adjustable parameters, while in the new empirical formula the inelastic part and the elastic part are explicitly separated. It is found that the new empirical formula can predict well the energy-dependence of the sputtering yield over a wide range of the ion-target combinations. Another interesting conclusion is that one of the adjustable parameters of the new formula, which corresponds to Sigmund alpha shows the Z//2-oscillation.

引用

页码：65 / 86

页数：22

共 24 条

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