PRIMARY RECOIL CONTRIBUTION TO LOW-ENERGY LIGHT-ION SPUTTERING

[1] ANDERSEN HH, 1981, SPUTTERING ION BOMBA

[2] LIGHT-ION SPUTTERING YIELDS FOR MOLYBDENUM AND GOLD AT LOW ENERGIES [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (11) : 4722 - 4728

[3] BAY HL, 1982, NUCL INSTRUM METHODS, V194

[4] SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS [J]. APPLIED PHYSICS, 1979, 18 (04): : 391 - 398

[5] BOHDANSKY J, 1980, J APPL PHYS, V51, P2961

[6] DANYLUK S, 1976, ANLCTRTM60 ARG NAT L

[7] GUSEVA MI, 1976, J NUCL MATER, V63, P241, DOI 10.1016/0022-3115(76)90333-0

[8] SPUTTER-EROSION AND IMPURITY EMISSION FROM TITANIUM AND VANADIUM AT LOW-ENERGY ION-BOMBARDMENT [J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) : 156 - 162

[9] ENERGY-SPECTRA OF LIGHT-IONS BACKSCATTERED FROM RANDOM SOLIDS [J]. APPLIED PHYSICS, 1978, 16 (03): : 247 - 253

[10] LITTMARK U, 1976, 8TH P YUG S PHYS ION, P139

[1] ANDERSEN HH, 1981, SPUTTERING ION BOMBA

[2] LIGHT-ION SPUTTERING YIELDS FOR MOLYBDENUM AND GOLD AT LOW ENERGIES [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (11) : 4722 - 4728

[3] BAY HL, 1982, NUCL INSTRUM METHODS, V194

[4] SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS [J]. APPLIED PHYSICS, 1979, 18 (04): : 391 - 398

[5] BOHDANSKY J, 1980, J APPL PHYS, V51, P2961

[6] DANYLUK S, 1976, ANLCTRTM60 ARG NAT L

[7] GUSEVA MI, 1976, J NUCL MATER, V63, P241, DOI 10.1016/0022-3115(76)90333-0

[8] SPUTTER-EROSION AND IMPURITY EMISSION FROM TITANIUM AND VANADIUM AT LOW-ENERGY ION-BOMBARDMENT [J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) : 156 - 162

[9] ENERGY-SPECTRA OF LIGHT-IONS BACKSCATTERED FROM RANDOM SOLIDS [J]. APPLIED PHYSICS, 1978, 16 (03): : 247 - 253

[10] LITTMARK U, 1976, 8TH P YUG S PHYS ION, P139