LUMINESCENT COLOR IMAGE GENERATION ON POROUS SILICON

被引:69
作者
DOAN, VV [1 ]
SAILOR, MJ [1 ]
机构
[1] UNIV CALIF SAN DIEGO,DEPT CHEM,LA JOLLA,CA 92093
关键词
D O I
10.1126/science.256.5065.1791
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Black and white images were projected onto n-type silicon (100) wafers during a photoelectrochemical etch to produce a color image that photoluminesces. The photoluminescence originates from a thin layer of luminescent porous silicon that is produced in the photoetch, and the colors that appear in the etched image arise from thin-film optical interference. A diffraction grating was also photoetched into the substrate, demonstrating simultaneous encoding of a gray-scale image into thin-film interference, luminescence, and diffraction phenomena.
引用
收藏
页码:1791 / 1792
页数:2
相关论文
共 23 条
[1]   POROUS SILICON - THE MATERIAL AND ITS APPLICATIONS IN SILICON ON INSULATOR TECHNOLOGIES [J].
BOMCHIL, G ;
HALIMAOUI, A ;
HERINO, R .
APPLIED SURFACE SCIENCE, 1989, 41-2 :604-613
[2]  
Born M., 1970, PRINCIPLES OPTICS, P401
[3]   THE ORIGIN OF VISIBLE LUMINESCENCE FROM POROUS SILICON - A NEW INTERPRETATION [J].
BRANDT, MS ;
FUCHS, HD ;
STUTZMANN, M ;
WEBER, J ;
CARDONA, M .
SOLID STATE COMMUNICATIONS, 1992, 81 (04) :307-312
[4]   PHOTOLUMINESCENCE OF HIGH POROSITY AND OF ELECTROCHEMICALLY OXIDIZED POROUS SILICON LAYERS [J].
BSIESY, A ;
VIAL, JC ;
GASPARD, F ;
HERINO, R ;
LIGEON, M ;
MULLER, F ;
ROMESTAIN, R ;
WASIELA, A ;
HALIMAOUI, A ;
BOMCHIL, G .
SURFACE SCIENCE, 1991, 254 (1-3) :195-200
[5]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[6]   ATMOSPHERIC IMPREGNATION OF POROUS SILICON AT ROOM-TEMPERATURE [J].
CANHAM, LT ;
HOULTON, MR ;
LEONG, WY ;
PICKERING, C ;
KEEN, JM .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (01) :422-431
[7]  
Chopra K. L., 1983, THIN FILM SOLAR CELL, P55
[8]   VISIBLE-LIGHT EMISSION DUE TO QUANTUM SIZE EFFECTS IN HIGHLY POROUS CRYSTALLINE SILICON [J].
CULLIS, AG ;
CANHAM, LT .
NATURE, 1991, 353 (6342) :335-338
[9]   PHOTOLITHOGRAPHIC FABRICATION OF MICRON-DIMENSION POROUS SI STRUCTURES EXHIBITING VISIBLE LUMINESCENCE [J].
DOAN, VV ;
SAILOR, MJ .
APPLIED PHYSICS LETTERS, 1992, 60 (05) :619-620
[10]  
HECHT E, 1987, OPTICS, P333