HIGH-ENERGY IMPLANTATION MASKING WITH POLYIMIDE

被引：2

作者：

MUTIKAINEN, RH ^{[1
]}

WONG, H ^{[1
]}

CHEUNG, NW ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90282-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：716 / 719

页数：4

共 7 条

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