NEW HIGH SENSITIVE ELECTRON RESIST MATERIALS

被引：6

作者：

PAAL, G ^{[1
]}

STRAHLE, UD ^{[1
]}

KIELHORN, G ^{[1
]}

机构：

[1] AEG TELEFUNKEN,RES INST,ULM,WEST GERMANY

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 12期

关键词：

D O I：

10.1149/1.2403350

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1714 / 1716

页数：3

相关论文

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