EPOXIDE-CONTAINING POLYMERS AS HIGHLY SENSITIVE ELECTRON-BEAM RESISTS

被引：72

作者：

HIRAI, T

HATANO, Y

NONOGAKI, S

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1971年 / 118卷 / 04期

关键词：

D O I：

10.1149/1.2408138

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：669 / &

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